| LEC # | topics | LecturerS |
|---|---|---|
| 1 | Overview/Safety/Lab Assignment (PDF) CI-M: Introduction to CI-M | MAS SR |
| 2 | IC Lab - Overview (PDF) | MAS |
| 3 | Oxidation | MAS |
| 4 | Diffusion (PDF - 4.5 MB)# | RCOH |
| 5 | IC Lab: Testing (PDF) CI-M: Writing Technical Reports (PDF) | MAS SR |
| 6 | Diffusion/Implantation (PDF)# | RCOH |
| 7 | MEMS Lab: Overview (PDF)# | MAS |
| 8 | Vacuum System (PDF) | RCOH |
| 9 | CVD (PDF) | RCOH |
| 10 | Sputtering (PDF) CI-M: Feedback on IC Report, Reports Returned (PDF) | RCOH SR |
| 11 | Fluids Lab: Overview | MAS |
| 12 | Evaporation (PDF - 2.6 MB)# | RCOH |
| 13 | MEMS Lab: Testing (PDF - 1.6 MB) | MAS |
| 14 | Lithography | MAS |
| 15 | Lithography, Soft Lithography | MAS |
| 16 | Etching (Wet) (PDF - 3.5 MB) | RCOH |
| 17 | Etching (Dry) (PDF) | RCOH |
| 18 | CMOS | MAS |
| 19 | Advanced Silicon Devices | MAS |
| 20 | Fluids Lab: Testing (PDF) | MAS |
| 21 | Take Home Introduction / Patents (PDF) | MAS |
| 22 | Take Home Discussion (PDF) | MAS |
| 23 | Advanced Topics (Guest) | |
| 24 | Advanced Topics (cont.) (Guest) | |
| 25 | Analog Devices Fab Tour |