Courses:

When you click the Amazon logo to the left of any citation and purchase the book (or other media) from Amazon.com, MIT OpenCourseWare will receive up to 10% of this purchase and any other purchases you make during that visit. This will not increase the cost of your purchase. Links provided are to the US Amazon site, but you can also support OCW through Amazon sites in other regions. Learn more.

The required textbook readings are listed by session below.

Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.

This Web site for the textbook contains the textbook errata and supplementary materials.

Madou, Marc. Fundamentals of Microfabrication. Boca Raton, FL: CRC Press, 1998. ISBN: 9780849394515. The 2002 edition is also fine.

Kovacs, Gregory T. A. Micromachined Transducers Sourcebook. New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.

Maluf, Nadim. An Introduction to Microelectromechanical Systems Engineering. Boston, MA: Artech House, 1999. ISBN: 9780890065815.

Nathan, Arokia, and Henry Baltes. Microtransducer CAD: Physical and Computational Aspects. New York, NY: Springer, 1999. ISBN: 9783211831038.

Romanowicz, Bartlomiej. Methodology for the Modeling and Simulation of Microsystems. New York, NY: Springer, 1997. ISBN: 9780792383062.

Tabib-Azar, Masood. Microactuators. Norwell, MA: Kluwer Academic, 1997. ISBN: 9780792380894.

Gardner, Julian W. Microsensors: Principles and Applications. New York, NY: John Wiley and Sons, 1994. ISBN: 9780471941361.

Ristic, Ljubisa, ed. Sensor Technology and Devices. Boston, MA: Artech House, 1994. ISBN: 9780890065327.

Ballantine, D. S, Jr., et al. Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications. Burlington, MA: Academic Press, 1996. ISBN: 9780120774609.

De Los Santos, Hector J. Introduction to Microelectromechanical (MEM) Microwave Systems. Boston, MA: Artech House, 1999. ISBN: 9780890062821.

Gere, James M., and Stephen P. Timoshenko. Mechanics of Materials. 2nd ed. Pacific Grove, CA: Brooks/Cole, 1984. ISBN: 9788123908946.

A more recent edition:
Gere, James, and Barry Goodno. Mechanics of Materials. Florence, KY: Cengage-Engineering, 2008. ISBN: 9780534553975.

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.

Muller, Richard S., Roger T. Howe, and Stephen D. Senturia, eds. Microsensors. New York, NY: IEEE Press, 1991. ISBN: 9780879422455.

Trimmer, William, ed. Micromechanics and MEMS. New York, NY: Wiley-IEEE Press, 1997. ISBN: 9780780310858.

Journal of Microelectromechanical Systems (IEEE/ASME)

Sensors and Actuators (Elsevier)

Sensors and Materials (MYU, Japan - in English)

Journal of Micromechanics and Microengineering (IOP)

Transducers 'XX (International Conference on Solid-State Sensors and Actuators), odd-numbered years since 1983, proceedings available from IEEE (US Meetings), Elsevier (European Meetings), IEE Japan (Japanese Meetings).

MEMS 'XX (IEEE Workshop on Micro Electro Mechanical Systems), annual since 1989.

Eurosensors 'XX, annual since 1987, proceedings published in special issues of Sensors and Actuators.

Note: The 'XX' in the above conference proceedings are used as placeholders for a unique year and should not be confused with the roman numeral "20".

Solid-State Sensors and Actuators Workshop, Hilton Head, SC, even-numbered years since 1984, proceedings available from Transducer Research Foundation.

Japanese Sensor Symposium, annual since 1982; technical digest published in English by the Institute of Electrical Engineers of Japan (IEE).

All readings presented in the table below refer to the required textbook:

Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.