| 1 | Overview of Semiconductor Manufacturing (PDF) |
| Statistical Process Control |
| 2 | Statistics Review: Distributions (PDF) |
| 3 | Statistics Review: Estimation (PDF) |
| 4 | Hypothesis Tests and Control Chart Introduction (PDF) |
| 5 | Control Charts |
| 6 | Advanced Control Charts, Nested Variance (PDF) |
| Experimental Design |
| 7 | Analysis and Design of Experiments (PDF) |
| 8 | ANOVA, Variance Component Estimation |
| 9 | MANOVA, Factorial Experiments (PDF)
Quiz #1 |
| Yield and Yield Learning |
| 10 | Design of Experiments and Response Surface Modeling (PDF) |
| 11 | RSM and Regression (PDF) (PDF) |
| 12 | Yield Management and Modeling |
| 13 | Yield Modeling |
| Advanced Process Control |
| 14 | Spatial Modeling |
| 15 | Sensors and Signals (PDF) |
| 16 | PCA and Time Series |
| 17 | Run by Run Control (PDF) |
| 18 | Real Time Control, Scheduling |
| Factory Operation and Design |
| 19 | Scheduling (PDF)
Quiz #2 |
| 20 | Planning (PDF) |
| 21 | Factory Design and Efficiency (PDF) |