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Design and Fabrication of Microelectromechanical Devices >> Content Detail



Study Materials



Readings

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The required textbook readings are listed by session below.



Required Textbook


Amazon logo Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.

This Web site for the textbook contains the textbook errata and supplementary materials.



Supplementary Readings




Books and Monographs


Amazon logo Madou, Marc. Fundamentals of Microfabrication. Boca Raton, FL: CRC Press, 1998. ISBN: 9780849394515. The 2002 edition is also fine.

Amazon logo Kovacs, Gregory T. A. Micromachined Transducers Sourcebook. New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.

Amazon logo Maluf, Nadim. An Introduction to Microelectromechanical Systems Engineering. Boston, MA: Artech House, 1999. ISBN: 9780890065815.

Amazon logo Nathan, Arokia, and Henry Baltes. Microtransducer CAD: Physical and Computational Aspects. New York, NY: Springer, 1999. ISBN: 9783211831038.

Amazon logo Romanowicz, Bartlomiej. Methodology for the Modeling and Simulation of Microsystems. New York, NY: Springer, 1997. ISBN: 9780792383062.

Amazon logo Tabib-Azar, Masood. Microactuators. Norwell, MA: Kluwer Academic, 1997. ISBN: 9780792380894.

Amazon logo Gardner, Julian W. Microsensors: Principles and Applications. New York, NY: John Wiley and Sons, 1994. ISBN: 9780471941361.

Amazon logo Ristic, Ljubisa, ed. Sensor Technology and Devices. Boston, MA: Artech House, 1994. ISBN: 9780890065327.

Amazon logo Ballantine, D. S, Jr., et al. Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications. Burlington, MA: Academic Press, 1996. ISBN: 9780120774609.

Amazon logo De Los Santos, Hector J. Introduction to Microelectromechanical (MEM) Microwave Systems. Boston, MA: Artech House, 1999. ISBN: 9780890062821.

Gere, James M., and Stephen P. Timoshenko. Mechanics of Materials. 2nd ed. Pacific Grove, CA: Brooks/Cole, 1984. ISBN: 9788123908946.

A more recent edition:
Amazon logo Gere, James, and Barry Goodno. Mechanics of Materials. Florence, KY: Cengage-Engineering, 2008. ISBN: 9780534553975.

Amazon logo Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.



IEEE Reprint Books


Amazon logo Muller, Richard S., Roger T. Howe, and Stephen D. Senturia, eds. Microsensors. New York, NY: IEEE Press, 1991. ISBN: 9780879422455.

Amazon logo Trimmer, William, ed. Micromechanics and MEMS. New York, NY: Wiley-IEEE Press, 1997. ISBN: 9780780310858.



Journals


Journal of Microelectromechanical Systems (IEEE/ASME)

Sensors and Actuators (Elsevier)

Sensors and Materials (MYU, Japan - in English)

Journal of Micromechanics and Microengineering (IOP)



Major Conference Proceedings


Transducers 'XX (International Conference on Solid-State Sensors and Actuators), odd-numbered years since 1983, proceedings available from IEEE (US Meetings), Elsevier (European Meetings), IEE Japan (Japanese Meetings).

MEMS 'XX (IEEE Workshop on Micro Electro Mechanical Systems), annual since 1989.

Eurosensors 'XX, annual since 1987, proceedings published in special issues of Sensors and Actuators.

Note: The 'XX' in the above conference proceedings are used as placeholders for a unique year and should not be confused with the roman numeral "20".

Solid-State Sensors and Actuators Workshop, Hilton Head, SC, even-numbered years since 1984, proceedings available from Transducer Research Foundation.

Japanese Sensor Symposium, annual since 1982; technical digest published in English by the Institute of Electrical Engineers of Japan (IEE).



Readings by Session


All readings presented in the table below refer to the required textbook:

Amazon logo Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.


LEC #TOPICSREADINGS
1Introduction to MEMS; microfabrication for MEMS: part IChapters 1 and 2
2Microfabrication for MEMS: part IIChapters 3 and 4
3Microfabrication for MEMS: part IIIChapters 3 and 4
4Microfabrication for MEMS: part IV; in-class fab problemChapters 3 and 5
5Fabrication for the life sciences; material properties
6Elasticity or electronics IChapters 8 and 14
7Structures or electronics IIChapters 9 and 14
8Lumped-element modelingChapter 5
9Energy-conserving transducersChapter 6
10Dynamics, especially nonlinearChapter 7
11Structures special topicsChapter 10
12Thermal energy domain; dissipationChapter 11
13Modeling dissipative processesChapter 12
14Fluids 1Chapter 13
15Fluids 2Chapter 13
16TransportChapter 13
17FeedbackChapter 15
18NoiseChapter 16
19PackagingChapter 17
20In-class design problem
21Design tradeoffs
22Power MEMS case study
23Optical MEMS case studyChapter 20
24Capacitive accelerometer case studyChapter 19
25BioMEMS case studyChapter 22
Final presentations

 








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