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Design and Fabrication of Microelectromechanical Devices >> Content Detail



Lecture Notes



Lecture Notes

JV: Session taught by Joel Voldman

CL: Session taught by Carol Livermore


LEC #TOPICSLECTURERS
1Introduction to MEMS; microfabrication for MEMS: part I (PDF 1) (PDF 2)JV/CL
2Microfabrication for MEMS: part II (PDF - 1.3 MB)CL
3Microfabrication for MEMS: part III (PDF - 1.5 MB)CL
4Microfabrication for MEMS: part IV; in-class fab problem (PDF)CL
5Fabrication for the life sciences; material properties (PDF)CL
6Elasticity (PDF) or electronics I (PDF)CL/JV
7Structures (PDF) or electronics II (PDF)CL/JV
8Lumped-element modeling (PDF)JV
9Energy-conserving transducers (PDF)JV
10Dynamics, especially nonlinear (PDF)JV
11Structures special topics (PDF)CL
12Thermal energy domain; dissipation (PDF)JV
13Modeling dissipative processes (PDF)JV
14Fluids 1 (PDF)JV
15Fluids 2 (PDF)JV
16Mass transport in liquids (PDF - 1.3 MB)JV
17Feedback (PDF)JV
18Noise (PDF)CL
19Packaging (PDF - 1.0 MB)CL
20In-class design problem (PDF)CL
21Design tradeoffs (PDF - 1.5 MB)CL
22Power MEMS case study (PDF - 3.1 MB)CL
23Optical MEMS case study (PDF)CL
24Capacitive accelerometer case study (PDF - 1.4 MB)JV
25BioMEMS case study (PDF)JV
Final presentations

 








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